Stability of a micromechanical pull-voltage reference
نویسندگان
چکیده
منابع مشابه
Stability of a micromechanical pull-in voltage reference
The reproducibility over temperature and time of the pull-in voltage of micromechanical structures has been analyzed and verified using fabricated devices in silicon. The pull-in structures are intended for use as an on-chip voltage reference. Microbeams of 100m length, 3m width, and 11m thickness are electrostatically actuated with a very reproducible pull-in voltage at 9.1 V. Devices demonstr...
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ژورنال
عنوان ژورنال: IEEE Transactions on Instrumentation and Measurement
سال: 2003
ISSN: 0018-9456
DOI: 10.1109/tim.2003.810007